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Fluorine gas mixtures as an environmentally friendly cleaning gas alternative for semiconductors
Semiconductor chip manufacturers use in their processes a variety of gases to pattern silicon wafers. After a number of wafers processed, the process chambers must be cleaned. To meet the need of the semiconductor industry, Solvay developed and patented globally two different fluorine gas mixtures as environmentally friendly gases for CVD cleaning processes. Solvaclean is a cleaning gas to replace three major cleaning gases C2F6, CF4 and NF3, with environmental friendly fluorinated gas mixtures. This project included validation and optimization of the new cleaning processes on production equipment and release to FAB production (semiconductor fabrication plant where devices such as integrated circuits are manufactured). Solvaclean is cleaning with similar speed and efficiency than the alternatives, with less gas used per utilisation.
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