enScribe™ Product line

Gallery enScribe™ Product line 1
Gallery enScribe™ Product line 1
February 2021
Headquarters 75007 Paris, France
Share

enScribe™ Product line - A solution to reduce the Global Warming Potential (GWP) impact associated with most contemporary gases used in semiconductor manufacturing processes

Fabrication of semiconductor device structures requires several gas-phase processes for controlled growth/removal of materials in order to create specific architectures. Air Liquide developed a new portfolio of advanced etching speciality gases to solve both technological and environmental future challenges in the semiconductor industry. It brings two kinds of advantages to semiconductor customers: not only do they address their new technical challenges for more advanced and complicated device, but they also bring environmental benefits by reducing the overall GWP footprint of their fab.

  • /

Key features

  • Reduces the process time by 50%
  • Improving a-C mask selectivity 3-4 times compared with C4F6
  • A thousand time smaller (1/1000) GWP compared with conventional fluorocarbons (a-C4F8)
  • enScribe™ G1 gas reduces client's fab CO2 emission by 4% - equivalent to the reduction of CO2 emission from 29,000 cars

Profitability

  • Less than 5 years payback time
  • Improve yield by 10 % compared to mainstream alternative

Categories of Application

Maturity Stage

  • Medium and large scale commercialization
  • Small scale commercialization
  • Initial market commercialization
  • Prototype testing in the real world
  • Prototype testing 1:1 in the lab

Similar solutions

We define a single solution as solving one problem in the same way. The following solutions solve the same problem in the same way and thus only count as one solution

Looking For

Activity Region

  • /
  • Headquarters
  • Activity

Related Topics

The information set out above, is solely for the purposes of information and the Solar Impulse Foundation does not provide any guarantee as to its authenticity, completeness or accuracy. This information does not constitute investment advice or a recommendation to buy into, transact or to enter into any agreement with any of the parties or persons mentioned above. Potential investors or interested parties are solely responsible for their investment or business decisions and for performing any due diligence required by the circumstances.