enScribe™ Product line - A solution to reduce the Global Warming Potential (GWP) impact associated with most contemporary gases used in semiconductor manufacturing processes
Fabrication of semiconductor device structures requires several gas-phase processes for controlled growth/removal of materials in order to create specific architectures. Air Liquide developed a new portfolio of advanced etching speciality gases to solve both technological and environmental future challenges in the semiconductor industry. It brings two kinds of advantages to semiconductor customers: not only do they address their new technical challenges for more advanced and complicated device, but they also bring environmental benefits by reducing the overall GWP footprint of their fab.
We define a single solution as solving one problem in the same way. The following solutions solve the same problem in the same way and thus only count as one solution
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