enScribe™ Product line - A solution to reduce the Global Warming Potential (GWP) impact associated with most contemporary gases used in semiconductor manufacturing processes
Fabrication of semiconductor device structures requires several gas-phase processes for controlled growth/removal of materials in order to create specific architectures. Air Liquide developed a new portfolio of advanced etching speciality gases to solve both technological and environmental future challenges in the semiconductor industry. It brings two kinds of advantages to semiconductor customers: not only do they address their new technical challenges for more advanced and complicated device, but they also bring environmental benefits by reducing the overall GWP footprint of their fab.
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